LPCVD System
- Model : LPCDHTF1200c
- Zone : 12”dia x 48L
- Max. Temp : 1200℃
- Heater : R-Type, 3Set T/C, lead wire and head 160A, 380V/60Hz/3ph
- 3 Zone
- PC Control: heat-up, cool-down, Vacuum, Pressure, Robotic arm
- Auto PID Control
- HMI to show up real-time temperature and parameter
- For 6~8" Wafer
- Customized temperature setting program and PID
Clean room elevated floor
6" Wafer
4 Tube System
Vacuum Cap System
PLC Control System